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Precision Rubber Seals for Semiconductor Manufacturing

Specialists in FFKM moulding — the elastomer this industry depends on, and the hardest to process well. That depth is the capability: from precision O-rings held to ±0.05 mm through to chamber seals moulded in one piece up to 1500 mm, engineered for plasma resistance, low particulation, and vacuum integrity.

Overview

Seals in semiconductor equipment work where contamination is the enemy and downtime is measured in wafers. Aggressive plasma, etch chemistries, thermal cycling, and vacuum all attack the material while the seal itself must generate minimal particles and hold dimensional stability through every process cycle.

We specialise in moulding FFKM, the elastomer family this industry depends on and the hardest to process well. Long cure cycles, unforgiving flow behaviour, and expensive material with no tolerance for scrap our depth in this material is the capability, and it extends to large chamber seals moulded in one piece up to 1500 mm.

From a 5 mm O-ring to a chamber seal, in the same material.

FFKM across the full size range — same process discipline, same tolerance, same result.

Applications

  • Wafer handling and transport system seals
  • Cleanroom enclosure and chamber door gaskets
  • Chemical-resistant seals for etch and process equipment
  • Low-particulate gaskets for gas and fluid delivery lines
  • Vibration-dampening mounts for precision fab equipment
Get In Touch contact section

Get In Touch

Address

Mumbai Office: Harkesh Rubber LLP, 108, Adarsh Industrial Estate, Sahar Road, Chakala, Andheri (East), Mumbai 400099

General Enquiries

contact@harkeshrubber.com

Business Phone

+91-22-40060400

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